Last publications:
E-Beam Micro-channel AmplifierTo sustain Moore´s law, that predicts doubling computer processing power every 18 months, new breakthroughs in core technology procedures in lithography have to be done. Particularly important i...
Deposition of epitaxial films of multicomponent compounds by magnetron sputtering, with YBa2Cu3O7-d as an example.
With the high-temperature superconductor YBa2Cu3O7-d used as an example it is shown by modeling the transport of the target atoms during magnetron sputtering that it is in principle possible to deposi...