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Deposition of epitaxial films of multicomponent compounds by magnetron sputtering, with YBa2Cu3O7-d as an example.

by Leonid Sakharov

With the high-temperature superconductor YBa2Cu3O7-d used as an example it is shown by modeling the transport of the target atoms during magnetron sputtering that it is in principle possible to deposit multicomponent compounds in the following regimes: deposition from a target of adjusted composition at a large magnetron-substrate distance, off-axis deposition, and the use of aerodynamic transport in deposition at high pressures from a stoichiometric target. An analysis is made of the dependence of the quality of the deposited films on the thermodynamic conditions of the substrate during the deposition and on the rate at which the material is deposited on it.

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